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Part No: 860 VACUUM Installed Components
COT #22 1 Assembly Part No: 5087-403837-12 NOZZLE(6-10) ASSY
Inventory # A-10695
A95-108-02
TEL Tokyo Electron PS2 RF Pump Box 3D81-000063-V5 2L81-050053-V1 3D81-000097-V1 Part No: 860 VACUUM InstalledTEL Tokyo Electron PS2 RF Pump Box 3D81 000063 V5 2L81 050053 V1 3D81 000097 V1 Inventory # A 19334 Model No: PS2 RF PUMP BOX Installed PCB's Part No: 3D81 050003 V1, TYB62E 1 RF Part No: 3D81 000039 V2, TYB62F 1 PUMP Part No: 3D81 000010 V2, TYB614 1 RFPD Card Part No: 3D81 000063 V5, TYB517 1 IOAS Card Part NO: 2L81 050053 V1, TYB513 1 IOGS LF Card Part NO: 3D81 000097 V1, TYB514 1 IO48 This TEL Tokyo Electron PS2 RF Pump Box is used working
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